Large PVD system

Ionization
source & Bias power supply --- No. of targets:16～26;Power of BIAS:
30kW～45kW. The proposed coating system is the PVD COATING SYSTEM TYPE
STN-20D30. The STN-20D30 has an enlarged loadingcapacity and has been
specially designed for large volume products decorative coating.

For large volume products the STN-20D30 offers an unsurpassed
productivity. This equipment is especially developed for those
applications requiring extreme large coating space, high loading
capacity, low temperatures (<300℃) and short cycle times. This makes
this system especially well suited for decorative parts.

The vacuum chamber unit has a cylinder design with one door opened
on the top of the process chamber and 26 (twenty-six) cathode Arc Ion
Sources.

Inner size of the chamber --- Diameter: 1500～1800mm；Height: 2000mm～3500mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC