The
coating system was specially designed for middle size products
functional coating purposes with high productivity. The vacuum chamber
unit has a cylinder design with one door opened on the front of the
process chamber and 6 (six) cathode Arc Ion Sources.

The system is supplied with all necessary manifolds, valves, traps,
controls, vacuum gauges and piping to achieve operating vacuum pressure.

The pumping system is controlled through the PLC supplied with the
equipment. All necessary information to the vacuum system is displayed
on a colored PLC touch screen.

Inner size of the chamber --- Diameter: 600～800mm; Height: 600mm～1000mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen or PLC & PC
Ionization source & Bias power supply --- Number of targets: 4～8; Power of BIAS: 10kW～20kW